Publication details
Time-resolved sputtered species number density in Ar/N2 HiPIMS
| Authors | |
|---|---|
| Year of publication | 2021 |
| Type | Appeared in Conference without Proceedings |
| MU Faculty or unit | |
| Citation | |
| Description | The online presentation described the temporal evolution of sputtered titanium atoms and titanium ions ground state densities in the target and substrate region, for four different nitrogen gas flow, and for two differently powered pulses. |
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