Publication details
Influence of Substrate Emisivity on Plasma Enhanced CVD
| Authors | |
|---|---|
| Year of publication | 1998 |
| Type | Article in Proceedings |
| Conference | ESCAMPIG 98 |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | plasma enhanced CVD |
| Description | Influence of Substrate Emisivity on Plasma Enhanced CVD |