Optical diagnostics of inductively coupled RF discharge during deposition of nanocomposite CNx/SiOy films

• Authors: ELIÁŠ Marek; KUDRLE Vít; BURŠÍKOVÁ Vilma; JANČA Jan
• Year of publication: 2000
• Type: Article in Proceedings
• Conference: Proceedings of 20th Summer School and International Symposium on the Physics of Ionized Gases
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Description: Optical diagnostics of inductively coupled RF discharge during deposition of nanocomposite CNx/SiOy films

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