Optical diagnostics of inductively coupled RF discharge

• Authors: ELIÁŠ Marek; KUDRLE Vít; BURŠÍKOVÁ Vilma; JANČA Jan
• Year of publication: 2001
• Type: Article in Proceedings
• Conference: SAPP 13th Symposium Proceedings
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: Optical diagnostics; inductively coupled RF discharge
• Description: Optical diagnostics of inductively coupled RF discharge

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