Preparation of enhanced CN-based hard coatings by PECVD

• Authors: ELIÁŠ Marek; ZAJÍČKOVÁ Lenka; BURŠÍKOVÁ Vilma; KUDRLE Vít; KLAPETEK Petr; JANČA Jan
• Year of publication: 2001
• Type: Article in Proceedings
• Conference: Proceedings of 15th International Symposium on Plasma Chemistry
• MU Faculty or unit: Faculty of Informatics
• Field: Plasma physics

Attached files

• ispc01.zip

• Description: Preparation of enhanced CN-based hard coatings by PECVD

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