Diagnostics of Radio Frequency Oxygen Plasma by Optical Emission Spectroscopy

• Authors: SUBEDI Deepak Prasad; ZAJÍČKOVÁ Lenka; BURŠÍKOVÁ Vilma; JANČA Jan
• Year of publication: 2001
• Type: Article in Proceedings
• Conference: WDS'01 Proceedings of Contributed Papers
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: rf plasma; emission sectroscopy; rotational temperature; actinometry
• Description: Low pressure radio-frequency plasma produced in a capacitively coupled planar reactor has been studied by optical emission spectroscopy. Rotational temperature of oxygen molecule has been estimated at pressure 37 Pa and rf power 100-450 W. Concentration of atomic oxygen atom was monitored by actinometry.

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