Publication details
In situ measurements of the electrical conductivity of a-C:H films in a pulsed rf discharge
| Authors | |
|---|---|
| Year of publication | 2001 |
| Type | Article in Proceedings |
| Conference | Proceedings of 15th International Symposium on Plasma Chemistry |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | conductivity |
| Description | In situ measurements of the electrical conductivity of a-C:H films in a pulsed rf discharge |