Deposition of hard carbon films and its diagnostics

• Authors: FRGALA Zdeněk; KUDRLE Vít; JANČA Jan; TÁLSKÝ Antonín
• Year of publication: 2001
• Type: Article in Proceedings
• Conference: Juniormat'01
• MU Faculty or unit: Faculty of Informatics
• Field: Plasma physics
• Description: Deposition of hard carbon films and its diagnostics

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