Simultaneous plasmachemical reduction of mixed tungsten and titanion precursors

• Authors: ELIÁŠ Marek; ŽÍLA Jaromír; JANČA Jan; BROŽEK Vlastimil
• Year of publication: 2002
• Type: Article in Periodical
• Magazine / Source: Czech. Jourmal of Physics
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: tungsten; titaniun; plasma; ICP
• Description: Simultaneous plasmachemical reduction of mixed tungsten and titanion precursors

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