Publication details
Spectroscopic analysis of a pulsed magnetron discharge
| Authors | |
|---|---|
| Year of publication | 2004 |
| Type | Article in Proceedings |
| Conference | Proceeding of Seventeenth European Conference on Atomic & Molecular Physics of Ionized Gases |
| MU Faculty or unit | |
| Citation | |
| Keywords | pulsed magnetron; spectroscopy |
| Description | To investigate the generation and transport of ions during and after a high power current pulse applied on magnetron cathode used for IPVD, we performed spectroscopic measurement with time and space resolution. Two microwave antennas placed between target and substrate ensure proper condition of current pulse developement, ion transport and by re-excitating of sputtered species, allows spectroscopic emission measurements of species transport toward the substrate. |