PECVD a opracování povrchu materiálů v nízkotlakých výbojích

Publication details

Title in English	PECVD and treatment of surfaces in low pressure discharges
Authors	ZAJÍČKOVÁ Lenka
Year of publication	2005
Type	Audiovisual work
MU Faculty or unit	Faculty of Science
Citation
Description	The presentations covers plasma technologies used for deposition of thin films and treatment of surfaces.
Related projects:	Synthesis of new Si-O(N)-C materials by plasmachemical methods