Influence of Oxygen Admixture on Nitrogen Capacitively Coupled Discharge

• Authors: DVOŘÁK Pavel; VAŠINA Petr; KUDRLE Vít; TÁLSKÝ Antonín
• Year of publication: 2006
• Type: Article in Proceedings
• Conference: Abstracts of Invited Lectures and Contributed Papers of 18th Europhysics Conference on Atomic and Molecular Physics of Ionised Gases
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: nitrogen; oxygen; capacitively coupled discharge
• Description: Study of capacitively coupled discharge ignited in nitrogen with small amount of oxygen by means of OES, Langmuir probe and mass spectroscopy techniques, proceeding

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