Silicon-oxide Containing Diamond-like Carbon Coatings Prepared Using Plasma Enhanced Chemical Vapor Deposition

• Authors: BURŠÍKOVÁ Vilma; DVOŘÁK Pavel; ZAJÍČKOVÁ Lenka; FRANTA Daniel; JANČA Jan; BURŠÍK Jiří; BLÁHOVÁ O.; PEŘINA V.; KLAPETEK P.
• Year of publication: 2006
• Type: Article in Proceedings
• Conference: Application of Nanocrystalline Diamond and Diamond Like Carbon Materials
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: PECVD; DLC; mechanical properties; adhesion; thermal stability
• Description: Silicon-oxide Containing Diamond-like Carbon Coatings Prepared Using Plasma Enhanced Chemical Vapor Deposition

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