Model of reactive magnetron sputtering process with non-uniform discharge current density

• Authors: VAŠINA Petr; HYTKOVÁ Tereza; ELIÁŠ Marek
• Year of publication: 2007
• Type: Article in Proceedings
• Conference: Proceeding of XXVIII International Conference on Phenomena in Ionized Gases
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: magnetron sputtering; reactive; Berg
• Description: Model of reactive magnetron sputtering process with non-uniform discharge current density, proceeding

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