Publication details
Laboratoř polovodičů - čisté prostory pro křemíkovou technologii na MU
| Title in English | Clean room laboratory for silicon device technology at Masaryk University |
|---|---|
| Authors | |
| Year of publication | 2007 |
| Type | R&D Presentation |
| MU Faculty or unit | |
| Citation | |
| Description | Presentation of the newly created Clean room laboratory for silicon device technology at Masaryk University, which has been opened in 2007. |
| Related projects: |