Publication details

Scanning probe microscopy analysis of delaminated thin films

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Year of publication 2007
Type Article in Periodical
Magazine / Source Journal of Physics: Conference Series
MU Faculty or unit

Faculty of Science

Field Solid matter physics and magnetism
Keywords Scanning probe microscopy; delaminatio; thin films
Description In this article the results of atomic force microscopy (AFM) and scaning thermal microscopy (SThM) of delaminated thin films are presented. It is shown that SThM data can be used for a very precise localisation of the delaminated areas that is necessary for the analysis of film material properties. Moreover, by using AFM it is also possible to characterize morphology of the blister upper boundary with a high resolution too. The quantitative results obtained by the above mentioned methods are compared with nanoindentation measurements.
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