Role of Neutral Gas Temperature on Hysteresis Behaviour of Reactive Sputtering Deposition Process

• Authors: VAŠINA Petr; HYTKOVÁ Tereza; ELIÁŠ Marek
• Year of publication: 2008
• Type: Article in Proceedings
• Conference: Programme and Abstract Book of 23rd Symposium on Plasma Physics and Technology, Prague, Czech Republic, 16.-19.June 2008
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: hysteresis; reactive sputtering
• Description: Theoretical study of role of neutral gas temperature on hysteresis behaviour of reactive sputtering deposition process

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