Higher harmonic frequencies measured in Capacitively Coupled Plasma

• Authors: DVOŘÁK Pavel; MORAVEC Zdeněk
• Year of publication: 2008
• Type: Article in Proceedings
• Conference: 2nd CESPC - Book of extended abstracts
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: plasma; higher harmonics
• Description: Measurement of higher harmonic frequencies in low-pressure capacitive discharge and dependence of their amplitudes on the matching unit parameters.

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