Publication details

Vacancies and self-interstitials dynamics in silicon wafers

Authors

CAHA Ondřej KUBĚNA Josef KUBĚNA Alan MEDUŇA Mojmír

Year of publication 2009
Type Article in Periodical
Magazine / Source Solid State Phenomena
MU Faculty or unit

Faculty of Science

Citation
Field Solid matter physics and magnetism
Keywords Silicon; vacancies; Interstitials; nucleation
Description This work deals mainly with the nucleation of vacancies during RTA concerning various cooling rates and initial states.
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