Vacancies and self-interstitials dynamics in silicon wafers

• Authors: CAHA Ondřej; KUBĚNA Josef; KUBĚNA Alan; MEDUŇA Mojmír
• Year of publication: 2009
• Type: Article in Periodical
• Magazine / Source: Solid State Phenomena
• MU Faculty or unit: Faculty of Science
• Field: Solid matter physics and magnetism
• Keywords: Silicon; vacancies; Interstitials; nucleation
• Description: This work deals mainly with the nucleation of vacancies during RTA concerning various cooling rates and initial states.

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