Publication details

Deposition and characterization of nc-TiC/a-C:H coatings prepared by hybrid PVD-PECVD

Authors

SOUČEK Pavel EL MEL Abdelazziz TESSIER Pierre-Yves ELIÁŠ Marek BURŠÍKOVÁ Vilma VAŠINA Petr

Year of publication 2010
Type Article in Proceedings
Conference Potencial and Application of Nanotreatment of Medical Surfaces
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords magnetron sputtering; coating; nanocomposite; mechanical properties
Description Several micrometers thick nc-TiC/a-C:H films were prepared by sputtering of the Ti target in a mixture of argon and acetylene gases. Polished steel substrates were used to come close to industrial conditions of usage of such films. The initial temperature of the steel substrates was found to have a significant impact on the quality of the deposited nc-TiC/a-C:H films.
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