Higher harmonic frequencies in capacitive discharges

• Authors: DVOŘÁK Pavel; VAŠINA Petr; BURŠÍKOVÁ Vilma; ŽEMLIČKA Radek
• Year of publication: 2010
• Type: Article in Proceedings
• Conference: 63rd GEC and 7th ICRP - Conference Proceedings
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: higher harmonic frequencies; electron concentration; plasma
• Description: Dependence of amplitudes of higher harmonic frequencies on electron concentration.

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