Investigation of silicon surface wettability after plasma treatment

• Authors: SKÁCELOVÁ Dana; SŤAHEL Pavel; HANIČINEC Martin; ČERNÁK Mirko
• Year of publication: 2010
• Type: Article in Proceedings
• Conference: HAKONE XII Contributed paper
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: Diffuse coplanar DBD, silicon, plasma treatment
• Description: In this contribution the influence of the plasma on crystalline Si (100) surface was studied. Dielectric barrier discharge the so called Diffuse Coplanar Surface Barrier Discharge (DCSBD) to plasma modification was used. The silicon surface modification after plasma treatment was investigated by AFM and contact angle measurement. Different way to clean the surface is reflected on the surface wettability after plasma treatment and the ageing effect of treated surface was studied too.

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