Publication details

Morphological study of nanocrystalline TiC/a-C:H composites deposited by hybrid PVD-PECVD process

Authors

VAŠINA Petr SOUČEK Pavel SCHMIDTOVÁ Tereza BURŠÍKOVÁ Vilma SCHÄFER Jan

Year of publication 2011
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description This paper presents the morphological study of nanocrystalline TiC/a-C:H composites deposited by hybrid PVD-PECVD process.
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