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Dielectric response and structure of amorphous hydrogenated carbon films with nitrogen admixture

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ZAJÍČKOVÁ Lenka FRANTA Daniel NEČAS David BURŠÍKOVÁ Vilma MURESAN Mihai George PEŘINA Vratislav COBET Christoph

Year of publication 2011
Type Article in Periodical
Magazine / Source Thin Solid Films
MU Faculty or unit

Faculty of Science

Field Solid matter physics and magnetism
Keywords Diamond-like carbon; Amorphous hydrogenated carbon; Optical properties; Band structure
Description The optical properties and structure of a-C:H films were modified by addition of nitrogen into the CH4/H2 deposition mixture. Three films prepared in capacitively coupled rf discharge were compared: (a) hydrogenated diamond like carbon film with hydrogen content of 34 % and indentation hardness of 21.7 GPa, (b) hard a-C:H:N film with nitrogen content of 13 % and indentation hardness of 18.5 GPa and (c) soft a-C:H:N film with nitrogen content of 10 % and indentation hardness of 6.7 GPa. It is shown how the parametrized density of states model describing dielectric response of electronic interband transitions can be applied to modified a-C:H:N and how it can be combined with correct treatment of transmittance measured in infrared range using additional Gaussian peaks in joint density of phonon states. This analysis resulted in determination of film dielectric function in wide spectral range (0.045-30 eV) and provided also information about the density of states of valence and conduction bands and lattice vibrations.
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