Mgr. Matej Fekete, Ph.D.

Researcher II, Deposition of Thin films and Nanostructures

office: pav. 06/02025
Kotlářská 267/2
611 37 Brno

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phone:	+420 549 49 4176
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Basic information

Type

Total number of publications: 52

2017

Titanium Atom and Ion Number Density Evolution in Reactive HiPIMS

FEKETE Matej BERNÁTOVÁ Katarína KLEIN Peter HNILICA Jaroslav VAŠINA Petr

Conference abstract

Year: 2017, type: Conference abstract

2016

Development of deposition process for growth of titanium/carbon coatings at laborato ry and industrial scale

VAŠINA Petr SCHMIDTOVÁ Tereza SOUČEK Pavel FEKETE Matej

Conference abstract

Year: 2016, type: Conference abstract
Time resolved study of Ti sputtered species number densities in multi-pulse HiPIMS discharge

FEKETE Matej HNILICA Jaroslav VITELARU Catalin MINEA Tiberiu VAŠINA Petr

Conference abstract

Year: 2016, type: Conference abstract

2015

Determination of titanium atom and ion densities in sputter deposition plasmas by optical emission spectroscopy

VAŠINA Petr FEKETE Matej HNILICA Jaroslav KLEIN Peter DOSOUDILOVÁ Lenka DVOŘÁK Pavel NAVRÁTIL Zdeněk

Article in Periodical

Plasma Sources Science and Technology, year: 2015, volume: 24, edition: 6, DOI
Effect of pulse off time on temporal evolution of sputtered species densities in multi-pulse HiPIMS discharge

FEKETE Matej HNILICA Jaroslav VAŠINA Petr

Article in Proceedings

Potential Application of Plasma and Nanomaterials 2015, year: 2015
Influence of pulse off time on temporal evolution of sputtered species densities in a HiPIMS discharge

FEKETE Matej HNILICA Jaroslav VAŠINA Petr

Conference abstract

Year: 2015, type: Conference abstract
Influence of pulse off time on temporal evolution of sputtered species densities in HIPIMS discharge

FEKETE Matej HNILICA Jaroslav VAŠINA Petr

Conference abstract

Year: 2015, type: Conference abstract
Temporal evolution of sputtered species densities in multi-pulse HiPIMS discharge

FEKETE Matej HNILICA Jaroslav VAŠINA Petr

Conference abstract

Year: 2015, type: Conference abstract

2014

Determination of sputtered species densities in a HIPIMS discharge by optical emission spectroscopy

VAŠINA Petr FEKETE Matej KLEIN Peter DOSOUDILOVÁ Lenka NAVRÁTIL Zdeněk HNILICA Jaroslav DVOŘÁK Pavel

Conference abstract

Year: 2014, type: Conference abstract
Determination of sputtered species densities in HIPIMS discharge by optical emission spectroscopy

FEKETE Matej VAŠINA Petr KLEIN Peter DOSOUDILOVÁ Lenka NAVRÁTIL Zdeněk HNILICA Jaroslav DVOŘÁK Pavel

Conference abstract

Year: 2014, type: Conference abstract