Deposition of Hard carbon films and Its Diagnostics

• Authors: FRGALA Zdeněk; KUDRLE Vít; JANČA Jan
• Year of publication: 2003
• Type: Article in Proceedings
• Conference: Proceedings of the XIVth SAPP
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: Diamond; microwave plasma CVD
• Description: We studied the growth of microcrystalline diamond films on pre-treated Si and WC-Co substrates by microwave plasma chemical vapour deposition (MPCVD). The pre-treatment was varied and its effect on diamond film was studied.

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