Project information
Porozumění hybridnímu PVD-PECVD procesu s cílem řídit růst nanostrukturovaných kompozitních vrstev
- Project Identification
- GAP205/12/0407
- Project Period
- 1/2012 - 12/2016
- Investor / Pogramme / Project type
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Czech Science Foundation
- Standard Projects
- MU Faculty or unit
- Faculty of Science
Tento projekt je zaměřen na studium chování hybridního PVD-PECVD procesu, který bude využit pro přípravu nanostrukturovaných kompozitních materiálů typu n-MC/a-C(:H). Hlavním cílem tohoto projektu je provést rozsáhlou diagnostiku depozičního plazmatu a porozumět souvislostem mezi parametry depozičního procesu, vlastnostmi depozičního plazmatu a vlastnostmi deponovaných vrstev.
Publications
Total number of publications: 60
2012
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Hybrid PVD-PECVD Process and Its Application for Carbon Ritch Nanocomposite Thin Film Deposition
Vrstvy a povlaky 2010: Zborník prednášok, year: 2012
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Hybrid PVD-PECVD Process for Synthesis of Me/C Nanocomposite Coatings
Year: 2012, type: Conference abstract
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Influence of hydrogen on behaviour of reactive magnetron sputtering
Potential and Applications of Surface Nanotreatment of Polymers and Glass: Book of Extended Abstracts, year: 2012
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Magnetron sputtering at CEPLANT project
Potential and Applications of Surface Nanotreatment of Polymers and Glass: Book of Extended Abstracts, year: 2012
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Modelling of Reactive Magnetron Sputtering with Focus on Changes in Target Utilization
Chemické listy, year: 2012, volume: 106, edition: S
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Monitoring and control of RF driven PVD, PECVD and etching plasmas using Fourier components of discharge voltages
Year: 2012, type: Conference abstract
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Optimization of nanocomposite n-TiC/a-C:H coatings preparation and TEM study of coatings structure after deformation
Potential and Applications of Surface Nanotreatment of Polymers and Glass: Book of Extended Abstracts, year: 2012
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Properties of nc-TiC/a-C:H films prepared by PVD-PECVD process at low and high ion bombardment
Year: 2012, type: Conference abstract
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Study of hybrid PVD-PECVD process and its application for metal/carbon film deposition
Year: 2012, type: Conference abstract
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Study of the Indentation Response of Nanocomposite n-TiC/a-C:H Coatings
Chemické listy, year: 2012, volume: 106, edition: S