Publication details

Time resolved study of Ti sputtered species number densities in multi-pulse HiPIMS discharge

Authors

FEKETE Matej HNILICA Jaroslav VITELARU Catalin MINEA Tiberiu VAŠINA Petr

Year of publication 2016
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description A technique based on effective branching fractions was extended to determine the absolute ground state number densities of Ti atoms and Ti ions. The effective branching method was cross validated by TD-LAS technique while studying the dc magnetron sputtering discharge. Influence of preceding pulse on the subsequent pulse in the m-HiPIMS mode was examined as a function of delay (200µs, 400µs and 1500µs) between two successive pulses for the pulse duration of 200µs.
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