Publication details

Study of self-organization in HiPIMS plasma, spoke merging and splitting

Authors

KLEIN Peter HNILICA Jaroslav LOCKWOOD-ESTRIN Francis BRADLEY James VAŠINA Petr

Year of publication 2019
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description High power impulse magnetron sputtering (HiPIMS) is a promising physical vapour deposition (PVD) technique, utilizing short pulses (several 10 s of microseconds) to deliver the power into the discharge. It is characterized by a very high concentration of ions in the deposition flux and it does not create macro-particles, unlike the arc deposition process. HiPIMS plasma manifests a self-organization into the ionization zones called spokes, rotating above the racetrack area of the target (the race track being the area on the target with the highest erosion induced by the sputtering) in both clockwise and anticlockwise E cross B direction depending on current density.
Related projects: