Informace o publikaci

Study of self-organization in HiPIMS plasma, spoke merging and splitting

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KLEIN Peter HNILICA Jaroslav LOCKWOOD-ESTRIN Francis BRADLEY James VAŠINA Petr

Rok publikování 2019
Druh Konferenční abstrakty
Fakulta / Pracoviště MU

Přírodovědecká fakulta

Citace
Popis High power impulse magnetron sputtering (HiPIMS) is a promising physical vapour deposition (PVD) technique, utilizing short pulses (several 10 s of microseconds) to deliver the power into the discharge. It is characterized by a very high concentration of ions in the deposition flux and it does not create macro-particles, unlike the arc deposition process. HiPIMS plasma manifests a self-organization into the ionization zones called spokes, rotating above the racetrack area of the target (the race track being the area on the target with the highest erosion induced by the sputtering) in both clockwise and anticlockwise E cross B direction depending on current density.
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