Comparison of optical and non-optical methods for measuring surface roughness

• Authors: OHLÍDAL Ivan; OHLÍDAL Miloslav; FRANTA Daniel; TYKAL Miroslav
• Year of publication: 1999
• Type: Article in Proceedings
• Conference: Proceedings of SPIE 3820, 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics
• MU Faculty or unit: Faculty of Science
• Web: http://hydra.physics.muni.cz/~franta/bib/SPIE3820_456.html
• Field: Solid matter physics and magnetism
• Keywords: Coherent optics; Surface roughness; Metrology
• Description: The values of the basic characteristics of surface roughness measured by means of optical and non-optical methods often differ mutually. So far a systematic comparison of the results obtained by those methods has not been done. The results we have achieved comparing optical and non-optical methods of the surface roughness measurement for selected samples of rough surfaces and for selected methods are presented.

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