Informace o publikaci
Deposition of Hard carbon films and Its Diagnostics
| Autoři | |
|---|---|
| Rok publikování | 2003 |
| Druh | Článek ve sborníku |
| Konference | Proceedings of the XIVth SAPP |
| Fakulta / Pracoviště MU | |
| Citace | |
| Obor | Fyzika plazmatu a výboje v plynech |
| Klíčová slova | Diamond; microwave plasma CVD |
| Popis | We studied the growth of microcrystalline diamond films on pre-treated Si and WC-Co substrates by microwave plasma chemical vapour deposition (MPCVD). The pre-treatment was varied and its effect on diamond film was studied. |
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