Publication details
IN-SITU INVESTIGATIONS OF SI AND GE INTERDIFFUSION IN SIGE MULTILAYERS AND CASCADE STRUCTURES
| Authors | |
|---|---|
| Year of publication | 2006 |
| Type | Article in Proceedings |
| Conference | XTOP 2006 - 8th Biennial Conference on High Resolution X-Ray Diffraction and Imaging |
| MU Faculty or unit | |
| Citation | |
| Field | Solid matter physics and magnetism |
| Keywords | interdiffusion; x-ray diffraction; thin films |
| Description | We have performed in-situ x-ray reflectivity and diffraction measurements in the range around 700 C. The Ge content profile in SiGe multilayers was used for simulating the x-ray reflectivity or diffraction spectra. |
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