Publication details
Design and Fabrication of High-Temperature SOI Strain-Gauges
| Authors | |
|---|---|
| Year of publication | 2008 |
| Type | Article in Proceedings |
| Conference | 7th International Conference on Advanced Semiconductor Devices and Microsystems |
| MU Faculty or unit | |
| Citation | |
| Field | Electronics amd optoelectronics, electrotechnics |
| Keywords | High-Temperature SOI Strain-Gauges; sensors |
| Description | The following paper introduces the CoventorWare design environment for SOI based piezoresistive sensor design. Fabrication process and characterization of designed sensors is also presented. The software package Coventor Ware has been used for design of mechanical and electrical characteristics of the structure. The tools enable design, modelling and successive modification of designed MEMS structures. The program enables: drawing of 2D layout and its editing, simulation of production process, generation of 3D model from 2D masks, generation of network by the method of finite elements, solution of mechanical, piezoresistive, thermal and further simulations. Simple passive elements (strain sensitive resistors - piezoresistors) were fabricated on SIMOX SOI substrates with sputtered AlCuSi metallization. Basic parameter extraction and their temperature dependence were performed. |
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