Publication details

Preparation of self-adhesive nc-TiC/a-C:H coatings


SOUČEK Pavel EL MEL Abdelazziz TESSIER Pierre-Yves ELIÁŠ Marek BURŠÍKOVÁ Vilma VAŠINA Petr

Year of publication 2010
Type Article in Proceedings
Conference Potential and Applications of Thin Ceramic and Metal Coatings
MU Faculty or unit

Faculty of Science

Field Plasma physics
Keywords magnetron sputtering; thin film; adhesion; nanocomposite
Description Several micrometers thick nc-TiC/a-C:H films were prepared by sputtering the Ti target in mixture of argon and acetylene gas. Depending on the deposition conditions, the formation of an interlayer between the substrate and the main columnar part of the coating was observed. The presence of this interlayer promotes significantly the adhesion of the coating.
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