Publication details

X-RAY LAUE DIFFRACTION STUDY OF OXYGEN PRECIPITATES IN CZOCHRALSKI SILICON

Authors

RŮŽIČKA Jiří MEDUŇA Mojmír

Year of publication 2011
Type Article in Periodical
Magazine / Source Materials Structure in Chemistry, Biology, Physics and Technology
MU Faculty or unit

Faculty of Science

Citation
Field Solid matter physics and magnetism
Keywords Czochralski silicon; oxygen precipitates; x-ray Laue diffraction; statistical dynamical theory of diffraction
Description In the presented article, oxygen precipitates in annealed Czochralski silicon were studied by X-ray diffraction in Laue geometry.
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