Publication details
X-RAY LAUE DIFFRACTION STUDY OF OXYGEN PRECIPITATES IN CZOCHRALSKI SILICON
| Authors | |
|---|---|
| Year of publication | 2011 |
| Type | Article in Periodical |
| Magazine / Source | Materials Structure in Chemistry, Biology, Physics and Technology |
| MU Faculty or unit | |
| Citation | |
| Field | Solid matter physics and magnetism |
| Keywords | Czochralski silicon; oxygen precipitates; x-ray Laue diffraction; statistical dynamical theory of diffraction |
| Description | In the presented article, oxygen precipitates in annealed Czochralski silicon were studied by X-ray diffraction in Laue geometry. |
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