Publication details

Homogenization of CZ Si wafers by Tabula Rasa annealing

Authors

MEDUŇA Mojmír CAHA Ondřej KUBĚNA Josef KUBĚNA Alan BURŠÍK Jiří

Year of publication 2009
Type Article in Periodical
Magazine / Source Physica B condensed matter
MU Faculty or unit

Faculty of Science

Citation
Field Solid matter physics and magnetism
Keywords Silicon; Infra red; Precipitates
Description The differences in oxygen precipitation, precipitate morphology and evolution of point defects in samples with and without Tabula Rasa applied were studied by experimental techniques such us infrared absorption spectroscopy, transmission electron microscopy, etching techniques and x-ray diffraction.
Related projects:

You are running an old browser version. We recommend updating your browser to its latest version.

More info