Publication details

Homogeneous and heterogeneous nucleation of oxygen in Si-CZ

Authors

KUBĚNA Josef KUBĚNA Alan CAHA Ondřej MEDUŇA Mojmír

Year of publication 2011
Type Article in Periodical
Magazine / Source Solid State Phenomena
MU Faculty or unit

Central European Institute of Technology

Citation
Field Solid matter physics and magnetism
Keywords Interstitials; Nucleation; Precipitation; Silicon; Vacancies
Description We present numerical simulations of nucleation kinetics of vacancies and interstitials during RTA and we study the impact of annealing temperature on bulk micro defect concentration.
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