Project information
Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges
- Project Identification
- GA202/07/1669
- Project Period
- 1/2007 - 12/2011
- Investor / Pogramme / Project type
-
Czech Science Foundation
- Standard Projects
- MU Faculty or unit
-
Faculty of Science
- doc. RNDr. Vilma Buršíková, Ph.D.
- Mgr. Oto Brzobohatý, Ph.D.
- doc. Mgr. Pavel Dvořák, Ph.D.
- Mgr. Daniel Franta, Ph.D.
- prof. RNDr. Josef Havel, DrSc.
- prof. RNDr. Jan Janča, DrSc.
- prof. RNDr. Vladislav Navrátil, CSc.
- doc. Mgr. Zdeněk Navrátil, Ph.D.
- prof. RNDr. Ivan Ohlídal, DrSc.
- doc. Mgr. Pavel Sťahel, Ph.D.
- prof. RNDr. David Trunec, CSc.
- doc. Mgr. Lenka Zajíčková, Ph.D.
- Keywords
- PECVD, dual frequency capacitive discharges DF CCP, nanostrukturovaný DLC, termomechanická kapacita
- Cooperating Organization
-
Institute of Nuclear Physics
- Responsible person RNDr. Vratislav Peřina, CSc.
- Responsible person Ing. Jaroslav Sobota, CSc.
- Responsible person Mgr. Petr Klapetek, Ph.D.
The aim of the present project is to develop a new deposition system based on application of dual-frequency capacitive plasma (DFCCP) for preparation of themally stable nanostructured diamod-like carbon (NDLC) films. With combination of high frequency excitation (ensuring plasma stability and its high density) and low frequency excitation (controlling the ion energy) we will achieve controlled growth of NDLC films. The objective of the study is to find the optimum combination of the high and low frequency (continuous or pulsed) excitation enabling to cover uneven and stepped substrate surfaces and significant lowering of the internal stress in films. Complex diagnostics and computer simulation of the DFCCP are planned in order to understand the processes of the film growth. The NDLC films will be exstensively studied from the point of view of their structure (RBS, ERDA, TOF ERDA, HRTEM, SEM etc.) as well as properties (micro- and nanoindentation, elipsometry, spectrophotometry, etc.). Moreover, the thermal stability of NDLC films will be studied using thermal desorption spectroscopy.
Publications
Total number of publications: 70
2012
-
Laser ablation synthesis of new gold phosphides using red phosphorus and nanogold as precursors. Laser desorption ionisation time-of-flight mass spectrometry
Rapid Communications in Mass Spectrometry, year: 2012, volume: 26, edition: 9, DOI
-
PROPERTIES OF MODIFIED AMORPHOUS CARBON THIN FILMS DEPOSITED BY PECVD
Chem. listy, year: 2012, volume: 106/2012, edition: 106
2011
-
Application of higher harmonic frequencies generated in RF plasmas for monitoring of deposition processes
Year: 2011, type: Conference abstract
-
Combination of Synchrotron Ellipsometry and Table-Top Optical Measurements for Determination of Band Structure of DLC Films
Thin Solid Films, year: 2011, volume: 519, edition: 9, DOI
-
Dielectric response and structure of amorphous hydrogenated carbon films with nitrogen admixture
Thin Solid Films, year: 2011, volume: 519, edition: 13, DOI
-
Evaluation of hardness, tribological behaviour and impact load of carbon-based hard composite coatings exposed to the influence of humidity
Diamond and Related Materials, year: 2011, volume: 20, edition: 4, DOI
-
Formation of aluminium, aluminium nitride and nitrogen clusters via laser ablation of nano aluminium nitride. Laser desorption ionisation and matrixassisted laser desorption ionisation timeofflight mass spectrometry
Rapid Communications in Mass Spectrometry, year: 2011, volume: 25, edition: 12, DOI
-
Higher harmonic frequencies in capacitive discharges and their using for monitoring of plasma processing
Year: 2011, type: Conference abstract
-
Influence of DLC films on higher harmonic frequencies in capacitive discharges
Year: 2011, type: Conference abstract
-
Measurement of Mechanical Properties of Composite Materials
CHEMICKÉ LISTY, year: 2011, volume: 105, edition: CHLSAC 105