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Enhancement of electrical properties of flexible ITO/PET by atmospheric pressure roll-to-roll plasma

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SHEKARGOFTAR Masoud KRUMPOLEC Richard HOMOLA Tomáš

Druh Článek v odborném periodiku
Časopis / Zdroj Materials Science in Semiconductor Processing
Fakulta / Pracoviště MU

Přírodovědecká fakulta

Citace
WWW https://www.sciencedirect.com/science/article/pii/S1369800117319601
Doi http://dx.doi.org/10.1016/j.mssp.2017.11.022
Obor Fyzika plazmatu a výboje v plynech
Klíčová slova Roll-to-roll Plasma treatment Diffuse plasma Work function Flexible electronics Surface cleaning
Popis Flexible materials can significantly reduce the cost of the electronic devices because they can be manufactured by large-area roll-to-roll (R2R) processing. In this work, R2R atmospheric pressure plasma was used to modify flexible indium-tin-oxide films on polyethylene terephthalate foil (ITO/PET). Plasma treatment was performed in different feed gases consisting of various ratio between nitrogen and oxygen. A range of experimental techniques were used to study surface properties of ITO/PET, including X-ray and Ultraviolet photoelectron spectroscopies, four-point probe, Atomic force microscopy and UV–Vis measurement. We found that R2R plasma treatment decreased carbon contamination and increased the number of oxygen vacancies on the surface, whereas the ratio between indium and tin remained constant. UPS showed an increase in the work function from 3.9 eV for untreated sample to 5.1 eV for sample treated in plasma for very short time of 2 s.
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