Informace o publikaci

Single-shot spatial-resolved optical emission spectroscopy of argon and titanium species within the spoke

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ŠLAPANSKÁ Marta KROKER Michael HNILICA Jaroslav KLEIN Peter VAŠINA Petr

Rok publikování 2022
Druh Článek v odborném periodiku
Časopis / Zdroj Journal of Physics D: Applied Physics
Fakulta / Pracoviště MU

Přírodovědecká fakulta

Citace
www https://iopscience.iop.org/article/10.1088/1361-6463/ac2cae/meta
Doi http://dx.doi.org/10.1088/1361-6463/ac2cae
Klíčová slova HiPIMS; spokes; excitation temperature; floating potential; optical emission spectroscopy; probe; magnetron sputtering
Popis The rotating plasma patterns, also known as ionisation zones or spokes, observed, among other discharges, in high power impulse magnetron sputtering discharge (HiPIMS) require non-invasive diagnostics favourable for a precise characterisation of their properties. In this contribution, the single-shot spatial-resolved optical emission spectroscopy of the spoke was conducted in non-reactive HiPIMS discharge using a titanium target. Investigated working pressures cover the conditions with the presence of localised, well-defined spokes. A fast photodiode and a cylindrical Langmuir probe were utilised to capture and determine the passing spoke position. These signals were synchronised with the acquisition of the optical emission spectrum by the intensified charge-coupled device detector. A large amount of single-shot data enabled the statistical analysis of the spoke. The optical emissions of argon atoms and ions and titanium atoms and ions were investigated in the passing spoke. It was found that the intensities of the spectral lines of the Ar and Ti species have the characteristic evolution for all studied spectral lines of this specific species within the spoke. The intensity evolutions are independent of the applied pressure. The evolution of the excitation temperatures determined by the Boltzmann plot method using the Ar II and Ti I and Ti II spectral lines remains constant within the spoke in the margin of standard error for all investigated pressures.
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