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Formation of metastable zirconium oxides using pulsed laser deposition of ZrO based target

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KŘENEK Tomáš MIKYSEK Petr POLA Michal VÁLA Lukáš MELARÉ Estela JANDOVÁ Věra VAVRUŇKOVÁ Veronika RIEGER David

Rok publikování 2019
Druh Článek ve sborníku
Konference IOP Conference Series: Materials Science and Engineering
Fakulta / Pracoviště MU

Přírodovědecká fakulta

Citace
www https://iopscience.iop.org/article/10.1088/1757-899X/613/1/012016
Doi http://dx.doi.org/10.1088/1757-899X/613/1/012016
Klíčová slova pulsed laser deposition; zirconium oxides; FTIR spectroscopy; Zr-O films; X-ray diffraction
Popis There is a growing interest about the possibilities for preparation of various zirconium oxides from scientific as well as application point of view. Laser ablation of solid target consisting of sintered grains of metallic hexagonal Zr3O and monoclinic ZrO2 results in evaporation of Zr, O species (ions, atoms) and subsequent deposition of Zr-O film. Ta and Cu have been used as substrates. The films were analyzed by SEM-EDX, Raman and FTIR spectroscopy and X-ray diffraction. The coat on Cu consists of monoclinic ZrO2, rhombohedric Zr3O, and metastable tetragonal ZrO2 phase.
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