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Predictive simulation of antenna effect in PVD processes using fluid models

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KUBEČKA Martin OBRUSNÍK Adam ZIKÁN Petr JÍLEK Mojmír VENCELS Juris BONAVENTURA Zdeněk

Rok publikování 2019
Druh Článek v odborném periodiku
Časopis / Zdroj SURFACE & COATINGS TECHNOLOGY
Fakulta / Pracoviště MU

Přírodovědecká fakulta

Citace
www https://www.sciencedirect.com/science/article/abs/pii/S0257897219310369
Doi http://dx.doi.org/10.1016/j.surfcoat.2019.125045
Klíčová slova PVD; Antenna effect; Edge effect; Vacuum arc; Titanium nitride; Simulation; Model
Popis We present numerical simulation of an ion-based physical vapor deposition coating process on a realistic part. The simulation is performed using a fluid model. By correlating the simulated ion flux to the surface of the coated part with experimentally measured thickness of the coating at the same conditions, it is shown that the model is capable of capturing the so-called antenna effect (edge effect). This local increase of coating thickness close to sharp edges of the part is a consequence of the plasma sheath of a negatively biased coated part. Additionally, we assess the sensitivity of the model to the boundary conditions imposed.
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