Informace o publikaci
Spectroscopic Ellipsometry of Slightly Rough Surfaces Covered by Layers
| Autoři | |
|---|---|
| Rok publikování | 1996 |
| Druh | Článek ve sborníku |
| Konference | ECASIA 95 - 6th European Conference on Applications of Surface and Interface Analysis |
| Fakulta / Pracoviště MU | |
| Citace | |
| www | http://hydra.physics.muni.cz/~franta/bib/ECASIA95_823.html |
| Obor | Teoretická fyzika |
| Popis | In this paper it will be shown that formulae for the ellipsometric parameters derived using the Rayleigh-Rice theory (RRT) can be used to determine the root-mean-square (rms) values of the heights sigma and the values of the autocorrelation lenghts T. |