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Optical and mechanical characterization of ultrananocrystalline diamond films prepared in dual frequency discharges

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KARÁSKOVÁ Monika ZAJÍČKOVÁ Lenka BURŠÍKOVÁ Vilma FRANTA Daniel NEČAS David BLÁHOVÁ Olga ŠPERKA Jiří

Druh Článek v odborném periodiku
Časopis / Zdroj Surface & coatings technology
Fakulta / Pracoviště MU

Přírodovědecká fakulta Centrum pro transfer technologií

Citace
Obor Fyzika plazmatu a výboje v plynech
Klíčová slova ultrananocrystalline diamond; bias enhanced nucleation; indentation hardness; ellipsometry; FTIR
Popis Ultrananocrystalline diamond (UNCD) films were deposited directly on polished c-Si substrates in microwave discharge (2.45 GHz) combined with rf capacitive plasma (13.56 MHz) ignited at the substrate electrode. The rf discharge induced a dc self-bias accelerating ions towards the growing film during the whole deposition process. The substrate was either preheated in hydrogen discharge to the deposition temperature of 900 C or the deposition of intermediate layer started at about 200 C and reached 900 C in the 5th minute. The latter procedure resulted in the deposition of coating with the hardness of 70 GPa and very good fracture toughness. The analysis of optical measurement in UV-IR range confirmed the presence of 250 nm thick intermediate layer containing DLC and SiC materials.
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