Informace o publikaci
Behavior of spokes at different magnetic fields
| Autoři | |
|---|---|
| Rok publikování | 2016 |
| Druh | Konferenční abstrakty |
| Fakulta / Pracoviště MU | |
| Citace | |
| Popis | The investigations of the non-reactive high power impulse magnetron sputtering (HiPIMS) discharge using current probes, high speed camera imaging and optical spectroscopy showed that plasma is not homogenously distributed over the target surface, but it is concentrated in regions of ionization zones called spokes which rotate above the erosion racetrack. The spokes were observed for certain combination of experimental parameters such as discharge current, pressure, target material and working gas. |
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