Informace o publikaci
Ellipsometry of thin films
| Autoři | |
|---|---|
| Rok publikování | 1998 |
| Druh | Článek v odborném periodiku |
| Časopis / Zdroj | Acta Physica Slovaca |
| Fakulta / Pracoviště MU | |
| Citace | |
| www | http://hydra.physics.muni.cz/~franta/bib/APS48_459.html |
| Obor | Fyzika pevných látek a magnetismus |
| Popis | In this paper a brief review of ellipsometric methods is presented for analyzing thin films. Examples of using these methods will be introduced as well. By means of results obtained using the ellipsometric methods introduced their practical meaning will be illustrated. It will be shown that the ellipsometric method can be tilized for analyzing single layers and multilayer systems in it successful way. |
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