Informace o publikaci
SENSITIVITY EXTREMA IN MULTIPLE-ANGLE ELLIPSOMETRY
| Autoři | |
|---|---|
| Rok publikování | 1985 |
| Druh | Článek v odborném periodiku |
| Časopis / Zdroj | JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A |
| Fakulta / Pracoviště MU | |
| Citace | |
| Obor | Optika, masery a lasery |
| Popis | A quantitative study of sensitivity of multiple-angle-of-incidence ellipsometry in determining several parameters of stratified structures is presented. |