Informace o publikaci

Feasibility study of WBC synthesis from segmented magnetron target

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KROKER Michael SOUČEK Pavel VAŠINA Petr

Rok publikování 2017
Druh Konferenční abstrakty
Fakulta / Pracoviště MU

Přírodovědecká fakulta

Citace
Popis Advanced segmented target was used for precise controlling of the chemical composition of the deposited coating. The target was composed of W, C, B4C cylindrical segments. Both homogeneous and highly-inhomogeneous coatings were deposited on steel substrate to determine the influence of the chemical composition on the properties of the deposited coatings. W-B-C coatings were synthesized using DC and pulsed DC magnetron sputtering. Substrates and coatings were heated during deposition to the temperature of 450 °C. Different values of negative bias were applied to substrate during deposition (50 V – 400 V).
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