Informace o publikaci

Properties of WBC coatings prepared by magnetron sputtering from industrial segmented target

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KROKER Michael SOUČEK Pavel ZÁBRANSKÝ Lukáš BURŠÍKOVÁ Vilma VAŠINA Petr

Rok publikování 2017
Druh Konferenční abstrakty
Fakulta / Pracoviště MU

Přírodovědecká fakulta

Citace
Popis W-B-C coatings in this study were synthesized using magnetron sputtering from a single segmented cylindrical target in an industrial configuration. Advanced segmented target was used to precise controlling chemical composition of coating. The target was composed of W, C, B4C cylindrical segments with same radii but different heights. Highly-inhomogeneous coatings were deposited on various substrates to determine the influence of chemical composition on coatings properties afterwards.The depositions were carried out at 450 °C.
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